JPH02113199U - - Google Patents
Info
- Publication number
- JPH02113199U JPH02113199U JP2085689U JP2085689U JPH02113199U JP H02113199 U JPH02113199 U JP H02113199U JP 2085689 U JP2085689 U JP 2085689U JP 2085689 U JP2085689 U JP 2085689U JP H02113199 U JPH02113199 U JP H02113199U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- beam irradiation
- irradiation device
- processing chamber
- processed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 9
- 239000007789 gas Substances 0.000 claims 2
- 239000011261 inert gas Substances 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2085689U JPH02113199U (en]) | 1989-02-23 | 1989-02-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2085689U JPH02113199U (en]) | 1989-02-23 | 1989-02-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02113199U true JPH02113199U (en]) | 1990-09-11 |
Family
ID=31237583
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2085689U Pending JPH02113199U (en]) | 1989-02-23 | 1989-02-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02113199U (en]) |
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1989
- 1989-02-23 JP JP2085689U patent/JPH02113199U/ja active Pending